半导体飞利浦红外加热灯 Semiconductors Philips InfraRed heat lamps

? High-power, high-efficiency heat source
? Long life
? Accurate temperature control
? High process reproducibility
? Instant heat

Philips InfraRed Lamps for precisely controllable semiconductor heating
O Efficient heat source: 90% of energy is transmitted as InfraRed heat
O Heat can be focused by using reflectors
O Instant heat: full power within a few hundred milliseconds after switch-on
O Fully dimmable: output accurately controllable from 0 to 100%
O Clean, emission-free heating
O Compact heat source

Philips InfraRed halogen lamps are designed specifically for heating applications in the semiconductor industry such as epitaxy, CVD, RTP and ion implant annealing.These lamps are
high-power heat sources. Tube blackening and resulting reduction in InfraRed output are negligible, ensuring very high stability throughout the lamp lifetime for semiconductor processing. High radiant energy concentrations are provided by InfraRed lamps. Full power is reached within a few hundred milliseconds of switch-on. Lamp power is fully controllable, with
 instant adjustment of the required radiation level between 0 and 100%.This means that silicon wafer temperature can be modulated accurately over a wide range to meet process specifications precisely. Process reproducibility is ensured by the ability to deliver exactly the same heat dose to the silicon wafer every time.

Applications
O Epitaxy
O CVD (Chemical Vapor Deposit)
O RTP (Rapid Thermal Process)
O Ion implant annealing
O Etching

Stable, reproducible InfraRed heating for the semiconductor industry

Lamp specifications Semiconductors

Type Lamp Voltage Fig. Cap/ Total Lamp Heating Diameter Finish Burning Average Colour Cable Cable 12 nc EOC US
wattage Base length length (mm) position Lamp temp. (mm) connection Product
(mm) (mm) life Number
(in W) (in V) C W D (in h) (K) X
13941Z 1.500 235 2 SK15 352,0 274,0 11,0 Clear Horizontal 1.000 2900 1200 Splice 9245.268.43916 871150049600325 -
13136V 4.600 400 1 V 303,0 242,0 12,0 Clear Horizontal 1.000 2900 35 Ring 9238.508.49124 871150049156525 256545
13170V 6.000 480 1 V 350,0 284,0 12,0 Clear Horizontal 1.000 2900 35 Ring 9245.298.51724 871150049161925 291146
13138V 6.000 480 1 V 303,0 236,0 12,0 Clear Horizontal 1.000 3000 35 Ring 9245.340.51724 871150049826725 291237
14131V 6.000 480 1 V 350,0 284,0 11,0 Clear Horizontal 1.000 3000 35 Ring 9245.514.51724 871150005581125 -
14118V 6.850 480 1 V 303,0 242,0 12,0 Clear Horizontal 1.000 3000 35 Ring 9245.412.51724 871150051863725 291708
14166V 6000 480 1 V 350 284 12,0 clear Horizontal 1000 3000 35 ring 924568951724 - -
14167V 6000 480 1 V 303 236 11,0 clear Horizontal 1000 3000 150 ring 924569751724 - -
14139 750 120 - - 113,7 72 13,0 clear Universal 1000 3000 - - 9245.539.36324 871150018495525 -
6990P metal 1000 120 3 G95 104 60 19,0 clear Universal 1000 3000 - - 9245.208.36328 871150049850225 291070
14302P ceramic 1000 120 3 G95 104 60 19,0 clear Universal 1000 3000 - - 9245.382.36328 871150049866325 -